Specifications
Gas proportioner:
It is mainly used for gas flow test and mixing gas in proportion to create an atmosphere environment with specific requirements for vacuum tube furnace or glove box. The control mode adopts integrated module control with strong functional extensibility. It can be added at will according to customer requirements.
The gas proportioner can be externally connected with two or more gases, adopts proton flowmeter, the gas pipeline is made of 316 polished pipe, has strong corrosion resistance, and the gas pipeline joint adopts stainless steel double ferrule quick joint, which is convenient for connection and not easy to leak.
1.Gas flow control in semiconductor manufacturing industry
2.Various vacuum coating equipment
3.Surface treatment of special materials
4.Gas combustion control
5.Mixed gas distribution system
6.Leak detection system
7.Environmental detection and analysis equipment
8.Gas flow measurement and control of analytical instruments
9.Chemical, petrochemical, metallurgy, optical fiber smelting and other places requiring gas detection and control
Model | KT-C4Z | KT-C3Z | KT-C2Z |
Gas Channel | Per Custom Design | ||
Type | High Precision/Quick Respinse/Smart Control/Touch Screen | ||
Gas Range | 20sccm-30slm(up to customer requirement) | ||
Accuracy | Precise±1％F.S | Normal±1％F.S | |
Repetition Accuracy | Precise±0.2% F.S | Normal±0.2% F.S | |
Linearity | Precise±0.5% F.S. | Normal±1% F.S. | |
Response Time | Precise≤2sec | Normal≤4sec | |
Working Temperature | (5~45)°C | ||
Power Input | ~85-265VAC 50/60Hz | ||
Max Power Consumption | 40W | ||
Inlet Pressure | ≤0.6MPa | ||
Connecting Pipe | 316 Pipe | ||
Stop Valve Type | solenoid valve | ||
Check valve opening pressure | 0.02Mpa | ||
Pressure display range | 0-0.6Mpa | ||
Control Mode | 7 inch Touch screen intelligent adjustment | ||
Time Setting | 0-32000Minutes | ||
Cleaning Function | One Key Cleaning | ||
program control | 5-segment programmable (time flow setting) | ||
Pressure Display | with（Outlet pressure detection） | ||
Gas mixing tank | with | ||
Gas Heating | No（Optional:gas mixing tank for heating. The heating temperature is adjustable from room temperature to - 350 ℃） | ||
Flow accumulation | with（Cumulative total current operating flow） | ||
Optional air inlet and outlet joint form | 3mm,6mm,1/8mm,1/4mmDouble ferrule joint | ||
Anti electromagnetic interference | with | ||
Dimension | 510X450X240 | 510X390X240 | 510X330X240 |
Weight | 18KG-45KG | ||