Specifications
Vacuum Pressure Controller KT-PID1000Z for Test and Measurement OEM Sale
A vacuum constant pressure control system, which includes a two-stage rotary vane mechanical pump with a pumping speed of 4-16 cubic meters per hour. The pumping rate of the vacuum pump is controlled through the linear valve, so as to obtain the precise measurement and constant pressure control of the pressure in the chamber. It can be combined with the supporting tubular furnace, coating machine, sealing machine and other equipment to realize the precise control of constant pressure in PVD, CVD, PECVD and other processes. It is widely used in diffusion, oxidation, epitaxy, CVD, plasma sputtering and coating process, optical fiber melting, mixed gas distribution system and other analytical instruments.
Product Name | vacuum constant pressure control system |
Model | KT-PID1000Z |
Control Mode | 7 inch touch screen PID close loop control |
Control Range | 100Pa-3000Pa(Total air intake≤500ml) 80Pa-2500Pa(Total air intake≤300ml) 50Pa-2000Pa(Total air intake≤100ml) 20Pa-1500Pa(Total air intake≤50ml) |
Vacuum gauge type | PIRANI vacuum gauge |
Vacuum gauge measure range | 1E5Pa to 1E-1Pa |
Vacuum gauge accuracy | 1E-1Pa to 1E4Pa ±10% of reading 1E4Pa to 1E5Pa ±20% of reading |
Suction port vacuum flange | KF25 |
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